| Applications |
• Rocking curves
• Reciprocal space mapping
• Phase identification and quantification
• Stress analysis
• Texture analysis
• Reflectivity |
| X-Ray source |
Cu Ka (1.5405 Å) |
| Incident beam optics |
• Hybrid monochromator
• Ge(440) monochromator
• X-Ray mirror
• Fixed divergence slit
• Cross slit |
| Diracted beam optics |
• Triple axis and rocking curve attachment
• Parallel Plate collimator
• Programmable receiving slit |
| Detectors |
Two sealed proportional detectors: 84% efficiency of Cu Ka |
| Goniometer |
High resolution: min step size is 0.0001 |
| Sample holders |
Wafer holder with 4 prong clips for pieces up to 4” diameter |
| Philips X’Pert Sotware |
• Data Collector
• Epitaxy (Rocking curve fit and simulation)
• Texture (Texture analysis)
• SmoothFit (Automated Fitting) |