HOT1: Digital Hot Plate

Model: Tek-Vac PRC-2000
Location: 1505 Fitzpatrick CIEMAS
Tool Group and Rate: Clean Room - $36.1/$72.2 per hour

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The Tec-Vac PRC-2000 is a compact hot-plate unit for consistent curing and baking of a broad range of photoresist materials and substrate sizes.

Applications	Controlled baking and curing of photoresist materials
Features	Digital temperature control Multiple substrate size processing Nitrogen purge
Specifications	Temperature range: 30 to 200C Uniform temperature area: 10" x 10" Temperature uniformity: 1%