PROBE1: Probe Station

Model: Signatone S-1160A-5
Location: 1505 Fitzpatrick CIEMAS
Tool Group and Rate: Clean Room - $36.1/$72.2 per hour

Training Request Training for PROBE1 Training Checklist for PROBE1 Operating Procedures PROB1 Operating Procedure Helpful Links Signatone Company Website Keithley Company Website Keithley 4200-SCS Parametric Analyzer Agilent Company Website Agilent 4284A LCR Meter

The probe station consists of the following components:

• Signatone S-1160A-5 Probe Station
• Signatone S-302-4 Four Point Resistivity Probe Station
• Signatone S926 Micropositioners and tip holders (4)
• Keithley 4200-SCS Parametric Analyzer
• Agilent 4284A LCR Meter

The Signatone Probe Station allows the user to probe small features and measure current, voltage, resistance, capacitance and conductance.  The current and voltage applied to the device can be "swept" through an operator determined range and the results can be viewed and saved in a graphical format.  Capacitance and conductance can be measured over a frequency range of  20Hz to 1MHz.

The Signatone four point resistivity probings system is used to make sheet resistance and resistivity measurements of substrates and thin films.  It interfaces with the Keithley 4200-SCS Parametric Analyzer to perform these measurements.

Applications	I-V characterization Low current measurements C-V characterization (at multiple frequencies) Resistance and conductance measurements Sheet resistance and resistivity measurements of substrates and deposited films
Features	Signatone S-1160 Probe Station Vacuum chuck and vacuum base micropositioners Micropositioner movement in x,y, and z for probing down to 1mm High powered optics up to 500x magnification Signatone S-302-4 Four Point Resistivity Probe Station 100mm probe stand with probe head quick mounting block 4 point probe head with 5mil radius tips of 40mil spacing Keithley 4200-SCS Parametric Analyzer Integrated PC with Windows-based graphical user interface Export data in Excel or ASCII formats and plots in bitmap, jpeg or tiff formats Interactive test environment allows for automated test sequences without writing code Configured with 3 SMUs (source-measure units) Configured with remote PreAmps for low current measurements Agilent 4284A LCR Meter 20Hz to 1MHz with over 8,600 test frequencies 0.05% basic accuracy, 6 digit resolution Constant V or I test signal level
Specifications	SMU Voltage measurement range: 1mV - 200V SMU Voltage measurement resolution: 1mV SMU Current measurement range: 0.1fA - 1A SMU Current measurement resolution: 0.1fA For Agilent 4284 LCR meter, see product data sheet. Click here for data sheet