ELL1: Ellipsometer

Model: Rudolph Auto EL III
Location: 1505 Fitzpatrick CIEMAS
Tool Group and Rate: Clean Room - $36.1/$72.2 per hour

Training Request Training for ELL1 Training Checklist for ELL1 Operating Procedures ELL1 Operating Procedure ELL1 Program and Pattern Log Helpful Links Rudolph Technologies company website AutoEl Ellipsometer product webpage

The Rudolph AutoEl III Ellipsometer offers fully automated, push buttom operation and substrate mapping capabilites.  It can measure thickness and index of refarction of single layer and double layer transparent films.  It can also measure the optical constants of bare substrates such as silicon, gallium arsenide, and gallium arsenide phosphide with direct readout of N and K.

Applications	Thickness and index of refraction of single layer and double layer transparent films Optical constants of substrates such as Si and GaAs
Features	Non-volatile memory to store frequently used programs and input data Printed readout of film thickenss, index of refraction, full cycle thickness, delta and psi Autocollimator/microscope for accurate sample alignment and viewing One button operation for routine measurements 6" sample stage with vertical and tilt adjustments and calibrated translation in plane of sample
Specifications	Operating principle: Null seeking Operating wavelength: 632.8nm Resolution and Accuracy Polarizer or Analyzer: 0.05 deg Delta: 0.1 deg Psi: 0.05 deg Film thickness: 0.30-1nm Index of refraction: 0.01 Angle of incidence: 70 deg and 90 deg (other angles possible with tool options) Measuring time Single film: 15 sec Double film: 20 sec Max sample size: 6" x 6"