SMIF
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Capabilities

SEM1: Scanning Electron Microscope

Model: FEI XL30 SEM-FEG
Location: 1557 and 1567 Fitzpatrick CIEMAS
Tool Group and Rate: SEM - $20.6/$41.2 per hour

Scanning Electron Microscope

Training

Operating Procedures pdf

Helpful Links


     

The FEI XL30 SEM offers ultra high resolution secondary electron imaging of a variety of samples. It can achieve magnifications of over 300,000X and has excellent depth of field. Minimal sample preparation is required because the highly coherent  beam produced by the field emission gun allows the use of very low beam voltages for imaging.

Applications
  • High Resolution Imaging
Benefits
  • True secondary electron imaging
  • Minimal charging of non-conductive samples
  • Low-Z materials
Resolution
  • ~ 2-3nm (Imaging)
Stage
  • X,Y,Z, Rotation and Tilt movement
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