COATHOOD1 -A-: Spin Coat Hood (left spinner) - RESIST ONLY

Model: Air Control Spin Coat Hood
Location: 1505 Fitzpatrick CIEMAS
Tool Group and Rate: Clean Room - $36.1/$72.2 per hour

Training Request Training for COATHOOD1 -A- Training Checklist for COATHOOD1 -A- Operating Procedures Wet Hood Operating Procedure Helpful Links Air Control website Headway Research website

Applications	Spin coating of materials (photoresist and EBL resist only)
Features	Dual Headway spin coaters with ability to be programmed up to 10,000 rpm and up to 9 process steps Solvent cup drain 3 explosion-proof temperature controlled hotplate Dual process timers CO2 fire suppression system
Specifications