PECVD1: Plasma Enhanced Chemical Vapor Deposition System

Model: Advanced Vacuum Vision 310
Location: 1505 Fitzpatrick CIEMAS
Tool Group and Rate: Clean Room - $36.1/$72.2 per hour

Training Request Training for PECVD1 Training Checklist for PECVD1 Operating Procedures PECVD1 Operating Procedure Helpful Links Advanced Vacuum website STS website

Applications	Deposition of oxide, nitride and oxynitride films
Features	Easy load chamber Variable substrate heating up to 300 C RF and Low Frequency (LF) generators
Specifications