EVAP2: E-beam & Thermal Metal Evaporator

Model: Kurt Lesker PVD 75
Location: 1505 Fitzpatrick CIEMAS
Tool Group and Rate: Clean Room - $36.1/$72.2 per hour

Training Request Training for EVAP2 Training Checklist for EVAP2 Operating Procedures EVAP2 Operating Procedure Helpful Links Kurt J Lesker website

Applications	E-Beam evaporation of the following metals: Ti Cr Au Ni Al Pt Thermal evaporation of the following metals: Au-Ge Ge
Features	Ability to electron beam evaporate or thermally evaporate metals Quartz crystal thickness monitoring
Specifications	4 x 7cc e-beam evaporation pockets 1 thermal evaporation pocket