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AFM1: Scanning Probe Microscope

Model: Digital Instruments Dimension 3100
Location: 1545 Fitzpatrick CIEMAS
Tool Group and Rate: AFM / ZYGO / MSA - $15.5/$31 per hour

Scanning Probe Microscope

Training

Operating Procedures pdf

Helpful Links

The scanning probe microscope (SPM) produces high resolution, three dimensional images by scanning a sharp tip over the sample surface. The name “scanning probe microscopy” (SPM) summarizes various measurement techniques such as atomic force microscopy (AFM), electric force microscopy (EFM). The Dimension 3100 brings together all of the major SPM techniques in a single platform that handles a wide range of sample types and sizes, up to eight inches in diameter, in air or fluids. The system's intuitive software, easy setup and alignment, and automated, intelligent sample approach streamline work and prevent damage to valuable samples.

Applications & Scanning Techniques
  • Sample imaging in air or fluid
  • Contact mode AFM
  • Tapping mode AFM
  • Lateral Force Mode
  • Force Imaging
  • Magnetic Force Imaging
  • Electric Force Microscopy (EFM)
  • Nanolithography
Noise
  • <0.5 Å RMS in vertical (Z) dimension with acoustic/vibration isolation
  • Mounted on vibration isolation table
Microscope
  • Dimension SPM head
  • 90 µm square X-Y imaging area
  • 6 µm Z range
Samples
  • Up to 150mm in diameter
  • Up to 12mm thick
  • Wet samples: fluid cell allows immersion of microscope head to max depth of 7mm
Stage
  • 125 x 100 mm inspectable area
  • 2 µm resolution
Tip Viewing
  • On-axis, real-time via microscope optics
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