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FURN3: Furnace - Hydrogen anneal

Model: ATS Series 3210
Location: 1505 Fitzpatrick CIEMAS
Tool Group and Rate: Clean Room - $36.1/$72.2 per hour

Furnace - Hydrogen anneal

Training

Operating Procedures pdf

If you are interested in using the Furnace, please contact SMIF

All samples going into the furnace must be reviewed and approved by SMIF.  Operation of the furnace is by SMIF staff (or their designates) only.

Helpful Links

ATS Furnace Series 3210 Web Page

Applications  Annealing in Hydrogen, Nitrogen, or vacuum environments
Specifications
  • Furnace temperature rating: 1200C
  • Inconel furnace tube with 3" inner diameter
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