FURN2-Tube2: Dry Oxidation

Model: Tempress 6304 4-Stack Furnace
Location: 1505 Fitzpatrick CIEMAS
Tool Group and Rate: Clean Room - $36.1/$72.2 per hour

Training Request Training for FURN2-Tube2 Operating Procedures Contact SMIF if you are interested in using this furnace.  This equipment is operated by SMIF staff only. All samples must be approved by SMIF and go through SMIF approved cleaning prior to processing

Applications	Dry oxidation
Features	Capable of handling small pieces up to 4" wafers (6" possible with additional boats)
Specifications	Temperature range: 950C - 1050C O2 ambient