Available Chemicals and Supplies

SMIF Supplied Chemicals
SMIF supplies most of the “standard” chemicals that are used in the facility. These chemicals are available to all certified users, and their use in covered in the usage fees. We ask that you do not bring in your own bottles of these chemicals.

Other Approved Chemicals
Chemicals in this list have been authorized for usage within SMIF, but are not supplied by the SMIF facility. Authorization is not needed to bring these chemicals into the facility, but we ask that you contact SMIF before using them to ensure available storage and verify proper use and disposal.

Any chemical that is not on the approved chemical list must first be authorized by SMIF before it can be brought into the facility. To bring a new chemical into the facility you must:

• Contact SMIF, and obtain approval before ordering the chemical
• Supply SMIF with an MSDS for the chemical from the manufacturer
• Ensure that the chemical is labeled properly:
• Name of chemical as it appears on MSDS
• Physical and health hazards of the chemical
• Your name and date
• Contact SMIF to verify proper storage, use, and disposal of the chemical

SMIF Lab Supplies
SMIF supplies the following laboratory items for users. Their use is covered in the usage fees.

SMIF Supplied Chemicals

Item	Description	Location
1165 Resist Remover	Microposit Remover 1165 Resist Remover To be used in solvent hoods!!!	Solvent cabinet
Aceatic Acid	Glacial Aceatic Acid Liquid, 500mL MSDS	Acidcab01, Rm 1562
Acetone	Acetone Liquid, 4L bottle MSDS
Ammonium Hydroxide	Ammonium Hydroxide (NH4OH) Liquid, 4L bottle MSDS
BOE	Buffered Oxide Etch 10:1 Liquid, 4L bottle MSDS
Citric Acid	Citric Acid Liquid, 4L bottle
DDSA	Dodecenyl Succinic Anhydride Liquid, 450mL MSDS	Solvcab01, rm 1562
DMP-30	Ancaminek 54 Curing Agent Liquid, 50mL MSDS	Solvcab01, Rm 1562
Embed 812	Embed 812 Epon resin Liquid, 450mL MSDS	Solvcab01, rm1562
Ethylene Glycol	Ethylene Glycol Liquid, 4L bottle, for chillers MSDS
Formaldehyde (20% aqueous)	20% Paraformaldehyde (formaldehyde) solution Liquid, 10 - 10mL Vials MSDS	Refrigerator, Rm 1562
Formvar (0.5%)	Formvar Solution in Ethylene Dichloride (0.5%) Liquid, 100mL MSDS	Solvcab01, Rm 1562
Glutaraldehyde (25% aqueous)	Glutaraldehyde (25% aqueous) Liquid, 10 - 10mL Vials MSDS	Refrigerator, Rm 1562
Hydrochloric Acid	Hydrochloric Acid (HCl) Liquid, 4L bottle MSDS
Hydrofluoric Acid	Hydrofluoric Acid (HF) Liquid, 4L bottle MSDS
Hydrogen Peroxide	Hydrogen Peroxide (H2O2) Liquid, 4L vented bottle MSDS
Isopropyl Alcohol	Isopropyl Alcohol (IPA / 2-Propanol) Liquid, 4L bottle MSDS
Lead Citrate	Lead Citrate, Trihydrate Small crystals, 100g MSDS	N2 Box, Rm 1562
Methanol	Methyl Alcohol Liquid, 4L bottle MSDS
MF-319 Developer	Microposit MF-319 Photoresist Developer Liquid, 1 gallon bottle
MIBK: IPA (1:3)	Methyl Isobutyl Ketone & IPA (1:3 ratio) Liquid, 4L bottle Info
NaOH	Sodium Hydroxide Pellets, 500g MSDS	Acidcab01, Rm 1562
Negative Resist NR9-1500PY	Futurrex NR9-1500PY Negative Photoresist Liquid
Nitric Acid	Nitric Acid (HNO3) Liquid, 4L glass bottle MSDS
NMA	Methyl-5-Norbornene-2,3-Dicarboxylic Anhydride Liquid, 450mL MSDS	Solvcab01, Rm 1562
OsO4 (4% )	Osmium Tetroxide (4%) Liquid, 10 - 10mL Vials MSDS	Refrigerator Rm1562
P20 Adhesion Promoter	Microprime Primer P20 Adhesion Promoter Liquid, 4L bottle Info
Parylene Dimer	Parylene Type C Dimer Solid pellets, for use in PARYL1 Info	Beside PARYL1, Sample Prep & Offline Lab, 1562 Fitzpatrick CIEMAS
PBS, 10x	Phosphate Buffered Saline, 10x Liquid, 1L MSDS	Refrigerator, Rm 1562
PMMA (495)	PMMA (495) - polymethyl methacrylate Liquid, for e-beam lithography Info
PMMA (950)	PMMA (950) - polymethyl methacrylate Liquid, for e-beam lithography Info
Positive Resist S-1813	Shipley Microposit S-1813 Positive Photoresist Liquid, 1 qt. bottle
Potassium Hydroxide	Potassium Hydroxide (KOH) Liquid, 4L bottle MSDS
Propylene Oxide	Propylene Oxide Liquid, 500mL bottle MSDS	Solvcab01, Rm1562
PTA	Phosphotungstic Acid Powder,  100g MSDS	N2 Box, Rm 1562
p-Xylene	p-Xylene	Photo Solvent Cabinet
RD6 Resist Developer	Futurrex RD6 Photoresist Developer
RR4 Resist Remover	Futurrex RR4 Photoresist Remover
Sodium Acetate	Sodium Acetate,Trihydrate GRANULAR SOLID, 500g MSDS	N2 Box, Rm 1562
Sodium Cacodylate	Sodium Cacodylate, Trihydrate Small Crystals, 500g MSDS	N2 Box, Rm 1562
Sulfuric Acid	Sulfuric Acid (H2SO4) Liquid, 4L bottle MSDS
TCE	Trichloroethylene (TCE) Liquid, 4L bottle MSDS	Solvent cabinet
TMS	Tetramethylsilane Liquid, 100g MSDS	Solvcab01, Rm 1562
Uranyl Acetate	Uranyl Acetate Powder, 25g MSDS	N2 Box, Rm 1562
ZED-N50 E-beam developer	ZED-N50 E-beam developer Developer for ZEP520A e-beam resists	Resist/Solvent cabinet in the photo area
ZEP520A E-beam resist	ZEP520A E-beam resist For e-beam lithography on EBL1	Resist/Solvent cabinet in the photo area

Other Approved Chemicals

Item	Description	Location
Acetic Acid	Acetic Acid	Acid Storage Cabinet
Aluminum Etch	Aluminum Etch Type D Liquid, 4L bottle	Acid cabinet
Ammonium Persulfate	Ammonium Persulfate Powder not to be stored in cleanroom.  Must be mixed into solution outside of cleanroom	Powder not to be stored in cleanroom.  Must be mixed into solution outside of cleanroom
Anisole	Anisole Solvent for ZEP E-Beam resist	Solvent Cabinet
AP3000 Adhesion Promoter	AP3000 Adhesion Promoter	Solvent cabinet
AZ 327 Developer	AZ 327 MIF Developer Liquid, 1 gallon bottle	WET1 Hood Storage
AZ 400K Developer	AZ 400K Photoresist Developer	WET1 Hood storage
AZ 400T Resist Stripper	AZ 400T Photoresist Stripper	WET1 Hood Storage
AZ 9260 Photoresist	AZ 9260 Photoresist (520CPS)	Solvent cabinet
AZ EBR 70/30	AZ EBR 70/30	Solvent cabinet
AZ P4620 Photoresist	AZ P4620 Photoresist	Solvent cabinet
BCB	BCB / Cyclotene Liquid, various types of BCB	Solvent cabinet
Benzene	Benzene	Solvent cabinet
Borosilicafilm	Borosilicafilm II	Solvent cabinet
BSI.P06090	Brewer Science BSI.P06090	Solvent cabinet
Buffer Solution, pH7	Buffer Solution, pH7
Chlorobenzene	Chlorobenzene Liquid	Solvent cabinet
Chloroform	Chloroform Liquid	Solvent cabinet
Chromium Etchant Type 1020	Chromium Etchant Type 1020	Acid Storage Cabinets in the Cleanroom
Copper 2300 Brightener	Technic Cu 2300 Brightener
Copper 2300 Carrier	Technic Cu 2300 Carrier
Copper Etch APS-100	Copper Etch APS-100	Acid cabinet
Copper Etchant 100/200	Copper Etchant 100/200	Acid cabinet
CR-14 Chromium Etchant	CR-14 Chromium Etchant	Acid cabinet
CR-7 Chromium Etchant	CR-7 Chromium Etchant	Acid cabinet
Cytop	Cytop CTX-809A
Cytop Solvent	Cytop CT-SOLV180
DC4-500 Dielectric Coating	Futurrex DC4-500 Dielectric Coating
Diacetone Alcohol	Diacetone Alcohol	Solvent cabinet
DS2100 Developer	DS2100 Developer (Dow) Liquid
EBR PG	Positive Radiation Resist Edge Bead Remover	Photo area solvent cabinet
EDTA	EDTA 50%
Ethanol	Ethyl Alcohol
Ethyl Lactate	Ethyl Lactate
EXP06059	Brewer Science EXP06050	Solvent cabinet
FC-75 Fluorinert	FC-75 Fluorinert
Filmtronics F100SM-F900SM	Filmtronics F100SM-F900SM Spin on dopant / spin on glass	Solvent cabinet
Filmtronics FG65 SOG	Filmtronics FG65 Series Spin-on Glass	Solvent cabinet
Formic Acid	Formic Acid MSDS	Acid cabinet
Glucose	Glucose
Gold Etchant GE-8110	Gold Etchant GE-8110	Acid cabinet
Gold Etchant GE-8148	Gold Etchant GE-8148	Acid cabinet
HD-4100	HD Microsystems HD-4100 Polyamic Ester	Solvent cabinet
Hexafluoroisopropanol	Hexafluoroisopropanol Info	Refrigerator or Solvent cabinet
Hexane	Hexane / Hexanes Liquid	Solvent cabinet
Hydrobromic Acid	Hydrobromic Acid (HBr) Liquid MSDS	Acid cabinet
IC1-200 Intermediate Coating	Futurrex IC1-200 Intermediate Coating
Ma-D 553 Developer	Ma-D 553 Developer	Developer storage cabinet
Ma-N 1410 resist	Ma-N 1410 resist	Photoresist storage
Mesitylene	Mesitylene Liquid MSDS	Solvent cabinet
MF-354 Developer	Microposit MF-354 Photoresist Developer Liquid, 4L bottle	WET1 Hood Storage
MIBK	Methyl Isobutyl Ketone	Solvent cabinet
Microprime 90 (MP90)	Microprime 90 (MP90) Adhesion Promoter contains HMDS Info	Solvent cabinet
Microprime 95 (MP95)	Microprime 95 (MP95) Adhesion Promoter contains HMDS Info	Solvent cabinet
Microprime HP Primer	Microprime HP Primer (100% HMDS) Hexamethyldisilazane (HMDS) 100% Info	Solvent cabinet
Model Fullcure 720	Model Fullcure 720
Nano-Strip	Cyantek Corporation Nano-Strip H2SO4, H2SO5, H2O2, and H2O mixture	Acid Cabinet
Negative Resist NR1-3000PY	Futurrex NR1-3000PY Negative Photoresist	Solvent cabinet
Negative Resist NR1-6000PY	Futurrex NR1-6000PY Negative Photoresist	Solvent cabinet
Negative Resist NR7-1000P	Futurrex NR7-1000P Negative Photoresist	Solvent cabinet
Negative Resist NR7-1000PY	Futurrex NR7-1000PY Negative Photoresist	Solvent cabinet
Negative Resist NR7-80P	Futurrex NR7-80P Negative Photoresist	Solvent cabinet
Negative Resist NR9-1000PY	Futurrex NR9-1000PY Negative Photoresist	Solvent cabinet
Negatove Resist NR4-8000P	Futurrex Negative Resist NR4-8000P	Solvent cabinet
NFR 015 Photoresist	JFR NFR015 Photoresist	solvent cabinet
Nickel Sulfamate, Nickel Bromide	High Speed Nickel Sulfamate, FFP RTU For plating
Nickel Sulfamate, Nickel Bromide	Nickel Sulfamate RTU (Techni Nickel For plating
Norland Optical Adhesive 61	Norland Optical Adhesive 61
Omnicoat	Omnicoat for SU-8 work Info	Solvent Cabinet
o-Xylene	o-Xylene	Solvent cabinet
PA-400R	HD Microsystems PA-400R Polyimide Ancillary	Solvent cabinet
PA-401D	HD Microsystems PA-401D Developer
PD523AD Developer	PD 523AD Developer
PDMS	Polydimethylsiloxane
PGMI 101 Developer	PGMI 101 Developer
Phosphoric Acid	Phosphoric Acid (H3PO4) Liquid MSDS	Acid cabinet
Phosphorosilicafilm	Phosphorosilicafilm 5 x 10 ** 20	Solvent cabinet
PMMA (Nano 200)	PMMA (Nano 200) - polymethyl methacrylate	Solvent cabinet
Poly - MEH-PPV	Poly - MEH-PPV (optical polymer ADS100RE)
Polyimide PI 2525	Polyimide PI 2525	Solvent cabinet
Polyimide PI 2556	Polyimide PI 2556	Solvent cabinet
Polyimide PI 2613	Polyimide PI 2613	Solvent cabinet
Positive Resist PR1-1000A	Futurrex PR1-1000A Positive Photoresist	Solvent cabinet
Positive Resist PR1-2000A	Futurrex PR1-2000A Positive Photoresist	Solvent cabinet
Positive Resist PR1-4000A	Futurrex PR1-4000A Positive Photoresist	Solvent cabinet
Potassium Dichromate	Potassium Dichromate
Primary Stripper A (Dow)	Primary Stripper A (Dow)
Propylene Glycol Monoethyl Acetate	Propylene Glycol Monoethyl Acetate
ProTEK B3 Primer	ProTEK B3 Primer
ProTEK B3-25	ProTEK B3-25
PZT	PZT Sol-Gel Solution E Series	Solvent cabinet photo area
Rinse T1100	Rinse T1100 (mesitylene)
RR2 Resist Remover	Futurrex RR2 Photoresist Remover
RR5 Resist Remover	Futurrex RR5 Resist Remover
Selenious Acid	Selenious Acid (H2SeO3)	Acid cabinet
Silanol	3-(trimethoxysilyl) Propyl Methacrylate
Silicon Powder	Silicon Powder Powder not to be stored in cleanroom.  Must be mixed into solution outside of cleanroom	Powder not to be stored in cleanroom.  Must be mixed into solution outside of cleanroom
Sodium Dodecyl Sulfate	Sodium Dodecyl Sulfate Flammable MSDS
Sodium Sulfide	Sodium Sulfide MSDS
Spin-On-Glass (SOG)	Accuglass "T−12B"(312B,412B,512B) Spin-On-Glass	Resist/solvent storage cabinet in the photo area
SU-8	SU-8 Photoresist Liquid, various types of SU-8	Solvent cabinet
SU-8 2000 Thinner	SU-8 2000 Thinner Resist Thinner	Photo area solvent cabinet
SU-8 Developer	SU-8 Photoresist Developer solvent	Solvent cabinet
Techni Copper FB Bath RTU	Copper Sulfate Pentahydrate / Sulfuric Acid For plating
Techni Copper FB Brightener	Techni Copper FB Brightener (Polyglycols) For plating
Techni Gold 25 ES RTU	Techni-Gold 25 ES RTU For plating
Teflon AF	Teflon AF
TEOS	TEOS
Tetrahydrofuran	Tetrahydrofuran (C4H8O) MSDS	Solvent cabinet
TMAH	Tetramethylammonium Hydroxide MSDS
Toluene	Toluene Liquid	Solvent cabinet
VM651 Adhesion Promoter	VM651 Adhesion Promoter	Solvent cabinet
VM652 Adhesion Promoter	VM652 Adhesion Promoter	Solvent cabinet

SMIF Lab Supplies

Item	Description	Location
Acid Gloves	Acid Gloves TRIonic rubber/neoprene/nitrile blend gloves	Acid storage cabinet
Aluminum Foil	Aluminum Foil 200ft roll, Renolds Wrap Aluminum Foil, for use with spin coater, etc.	Photo supply rack, Prep Lab
Carbon tape	Double sided carbon tape for holding samples Info	SEM Lab XPS hood
Chemical Apron	Chemical Apron - Acid Resistant Chemical Apron (blue)	Near Chemical Hoods
Copper tape	Double sided copper tape for holding samples Info	SEM Lab
Face Masks	Fask Masks BCR Berkshire Face Masks	Gowning Area
Face Shield	Chemical Face Sheild To protect from acids	Near Chemical Hoods
Kapton Tape	Double sided kapton tape (2-sizes) For RIE system use for sample adhesion Info	RIE1
Latex Gloves - L	Large Latex Gloves Diamind Grip Large Gloves	Gowning Area, Cleanroom, SEM Lab, Prep Lab, TEM Lab
Latex Gloves - S	Small Latex Gloves Diamond Grip Small Gloves	Gowning Area, Cleanroom, SEM Lab, Prep Lab, TEM Lab
Pipettes	Plastic disposable pipettes	Photo supply rack, Prep Lab, Bio-bay
Safety Glasses	Safety Glasses UVEX Safety Glasses	Gowning Area
SEM Stubs	SEM Sample Mount Stubs For FEI/Philips SEM if given choice. Flat and cross-section stubs. Info	SEM Lab
Shoe Covers	Blue non-skid shoe covers Universal Critical Cover shoe cover w/nonskid soles	Gowning Area
Swabs	Swabs Zapped foam head,  polypropylene handle	Photo supply rack
Waste Labels	Chemical Waste Labels To label waste bags with: chemical, user name  & date	Cleanrooom, Prep Lab
Wipes	Cleanroom Wipes Durx 770 9x9 cleanroom wipes	Cleanrooom, Prep Lab
Ziplock bags	Ziplock bags 12" x 15", Use for waste collection	Cleanrooom, Prep Lab

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