Equipment Training and Operating Procedures

EQUIPMENT CODE	EQUIPMENT NAME	OPERATING PROCEDURES	TRAINING CHECKLIST	CERTIFIED USERS
X-RAY LAB (1537 Fitzpatrick CIEMAS)
XDIF1	X-Ray Diffractometer	Rocking Curve Measurement Diffraction Space Maps Reflectivity Measurement Texture – Pole Figures 2theta Phase Analysis Measurement 2theta Phase Analysis – Grazing Incident		Users
XPS1	X-Ray Photoelectron Spectrometer	XPS1 Operating Procedure (Rev7) CasaXPS Data Processing Procedure XPS1 Sputter Cleaning Procedure (Rev3) XPS1 Imaging and Small Area Spectroscopy Procedure XPS1 Optimizing Z for Spectroscopy Procedure (Rev3) XPS1 Software Start Up Procedure (Rev4) XPS1 Acquisition Conditions Reference Sheet Sample Loading Using the Bar Holder		Users
SEM LAB (1557 and 1567 Fitzpatrick CIEMAS)
SEM1	Scanning Electron Microscope	Imaging Procedure Safe Usage of the FEI SEM Processing Biological SEM Samples		Users
SEM2	Environmental Scanning Electron Microscope	SEM2 operating procedure for HiVac mode SEM2 operating procedure for wet mode SEM2 operating procedure for variable pressure mode Safe Usage of the FEI SEM ESEM Theory Processing Biological SEM Samples Certification checklist for Wet Mode Certification checklist for Variable Pressure Mode		Users
CLEANROOM (1505 Fitzpatrick CIEMAS)
ACIDHOOD1	Small Acid Chemical Hood	Wet Hood Operating Procedure		Users
ACIDHOOD2	Large ADA Acid Chemical Hood	Wet Hood Operating Procedure		Users
ASH1	Plasma Asher	ASH1 Operating Procedure		Users
BIOHOOD1	Biological Hood	Bio Bay Procedures		Users
BIOHOOD2	Biological Hood	Bio Bay Procedure		Users
COATHOOD1 -A-	Spin Coat Hood (left spinner) - RESIST ONLY	Wet Hood Operating Procedure		Users
COATHOOD1 -B-	Spin Coat Hood (right spinner) - RESIST ONLY	Wet Hood Operating Procedure		Users
COATHOOD2 -A-	Spin Coat Hood (left spinner) - ANY MATERIAL	Wet Hood Operating Procedure		Users
COATHOOD2 -B-	Spin Coat Hood (right spinner) - ANY MATERIAL	Wet Hood Operating Procedure		Users
DEVHOOD1 -A-	Develop Hood (left side)	Wet Hood Operating Procedure		Users
DEVHOOD1 -B-	Develop Hood (right side)	Wet Hood Operating Procedure		Users
EBL1	E-Beam Lithography System	EBL1 Operating Procedure EBL Guidelines EBL CAD Procedure EBL Field Correction Procedure EBL Overlay Procedure EBL Resist Processes ZEP520A Technical Report		Users
ELL1	Ellipsometer	ELL1 Operating Procedure ELL1 Program and Pattern Log		Users
EVAP1	E-Beam Metal Evaporator	EVAP1 Operating Procedure EVAP1 Run Sheet		Users
EVAP2	E-beam & Thermal Metal Evaporator	EVAP2 Operating Procedure		Users
FLIP1	Flip Chip Bonder			Users
FURN2-Tube1	High Temperature Anneal N-type doping	Contact SMIF if you are interested in using this furnace.  This equipment is operated by SMIF staff only. All samples must be approved by SMIF and go through SMIF approved cleaning prior to processing		Users
FURN2-Tube2	Dry Oxidation	Contact SMIF if you are interested in using this furnace.  This equipment is operated by SMIF staff only. All samples must be approved by SMIF and go through SMIF approved cleaning prior to processing		Users
FURN2-Tube3	Low Temp Anneal and High Temp Anneal for P-type doping	Contact SMIF if you are interested in using this furnace.  This equipment is operated by SMIF staff only. All samples must be approved by SMIF and go through SMIF approved cleaning prior to processing		Users
FURN3	Furnace - Hydrogen anneal	If you are interested in using the Furnace, please contact SMIF All samples going into the furnace must be reviewed and approved by SMIF.  Operation of the furnace is by SMIF staff (or their designates) only.		Users
GLOVE1	Glove Box	Contact SMIF staff for a .pdf of the operation manual.		Users
HOT1	Digital Hot Plate	HOT1 Operating Procedure		Users
NANO1	Film Thickness Measurement	NANO1_OperatingProcedure		Users
OVEN2	Bake Oven	Turn power switch on. Adjust setpoint with up and down arrows on controller.  Press the set/ent button to accept the temperature change.  Turn off the power switch when finished.		Users
OVEN3	Vacuum Bake Oven	OVEN3 Operating Procedure		Users
PECVD1	Plasma Enhanced Chemical Vapor Deposition System	PECVD1 Operating Procedure		Users
PHOTO1	Mask Aligner	PHOTO1 Operating Procedure Baseline Photolithography Processes Mask Cleaning Procedures		Users
PHOTO2	Frontside/Backside Mask Aligner	PHOTO2 Operating Procedure Baseline Photolithography Processes Mask Cleaning Procedures		Users
PROBE1	Probe Station	PROB1 Operating Procedure		Users
PROF2	Profilometer	Operating Procedure for PROF2		Users
RIE1	Oxide/Nitride/Polymer Reactive Ion Etcher	RIE1 Operating Procedure		Users
RIE2	III-V Reactive Ion Etcher	RIE2 Operating Procedure		Users
RTA1	Rapid Thermal Anneal System	RTA1 Operating Procedure		Users
SCOPE1	Microscope w/ camera (manual)			Users
SCOPE3	Fluorescence Microscope w/camera	Operating Procedures		Users
SCOPE4	Nomarski Microsope w/camera			Users
SOLVHOOD1	Small Solvent Chemical Hood	Wet Hood Operating Procedure		Users
SOLVHOOD2	Large ADA Solvent Chemical Hood	Wet Hood Operating Procedure		Users
SPUT2	RF Dielectric Sputter System	Operating Procedure for SPUT2		Users
SPUT3	DC Sputter System	Operating Procedure for SPUT3		Users
SAMPLE PREP & OFFLINE LAB (1562 Fitzpatrick CIEMAS)
ACIDHOOD3	Prep/Offline Acid Chemical Hood	Wet Hood Operating Procedure		Users
CARBON1	Vacuum Coating System	Operating Procedure for CARBON1		Users
CPD1	Critical Point Dryer	CPD1 Operating Procedure CPD1 Biological Samples Procedure		Users
CPD2	Critical Point Dryer	CPD2 Operating Procedures CPD2 Trouble Shooting		Users
MTOME1	Ultra Microtome			Users
OVEN1	High Temperature Bake Oven	OVEN1 Operating Procedure		Users
OVEN4	Low Temperature Oven for Non-Hazardous Materials	Turn power switch on.  Adjust set point with the knob on the front.  Temperature can be read on the thermometer read out on the right side of the oven.  Turn off the power switch when finished.		Users
PARYL1	Parylene Coater	PARYL1 Operating Procedure Useful Parameters for Parylene Deposition		Users
PLAP1	Polishing and Lapping Machine	PLAP1 Operating Procedure		Users
SAW1	Utility Saw	SAW1 Operating Procedure		Users
SAW2	Dicing Saw			Users
SCOPE5	Microscope			Users
SCOPE6	Microscope w/camera			Users
SCOPE7	Stereo Microscope			Users
SOLVHOOD3	Prep/Offline Solvent Chemical Hood	Wet Hood Operating Procedure		Users
SPUT4	Vacuum Sputter Coater	SPUT4 Operating Procedure SPUT4 Au Deposition Rate Chart SPUT4 Au-Pd Deposition Rate Chart		Users
VITRO1	Vitrobot	Vitrobot Reference Paper and Procedure		Users
WIBO1	Wire Bonder	WIBO1 Operating Procedure		Users
OPTICAL CHARACTERIZATION LAB (1541 Fitzpatrick CIEMAS)
OPT2	FT-IR Spectrometer	OPT2 Operating Procedure		Users
OPT3	RAMAN/PL	OPT3 Operating Procedure for Raman Spectroscopy OPT3 Calibration Procedure		Users
TEM LAB (1549 Fitzpatrick CIEMAS)
TEM2	Transmission Electron Microscope	TEM2 Operating Procedure Processing Biological TEM Samples Negative Staining of Samples		Users
AFM / ZYGO / MSA LAB (1545 Fitzpatrick CIEMAS)
AFM1	Scanning Probe Microscope	AFM1 Imaging procedure - Nanoscope 6.14r1 AFM1 Fluid Cell Procedure AFM1 Imaging procedure - Nanoscope SPM		Users
MSA1	Micro-Strain Analyzer	MSA1 Film-Fiber Tensile-Compression Testing Operating Procedure		Users
OPT1	UV-Vis-NIR Spectrophotometer	OPT1 Operating Procedure		Users
SCOPE2	Stereo Microscope			Users
ZYGO1	3D Optical Profiler	ZYGO1 Operating Procedure		Users