You must schedule time on equipment in advance using the on-line reservation calendar. Equipment is generally reserved on a first-come basis, although some tools have sign-up restrictions that are posted at the top of the reservation calendar. To reserve time on equipment, click on the “Schedule time” link or to view the reservation calendar, click on the “View calendar” link in the table below for the particular piece of equipment of interest.

All equipment is available to qualified users as follows:

• Cleanroom Fabrication Lab:    8am to 8pm, 7 days a week
• All other Labs:                       24 hours a day, 7 days a week

Staff assistance is only available Monday-Friday 9am-5pm. Drop-ins will be accommodated if no prior reservation exists at that time.

SEM2 ()
CLEANROOM (1505 Fitzpatrick CIEMAS)
ACIDHOOD1	Small Acid Chemical Hood	Schedule time View calendar
ACIDHOOD2	Large ADA Acid Chemical Hood	Schedule time View calendar
ASH1	Plasma Asher	Schedule time View calendar
BIOHOOD1	Biological Hood	Schedule time View calendar
BIOHOOD2	Biological Hood	Schedule time View calendar
COATHOOD1 -A-	Spin Coat Hood (left spinner) - RESIST ONLY	Schedule time View calendar
COATHOOD1 -B-	Spin Coat Hood (right spinner) - RESIST ONLY	Schedule time View calendar
COATHOOD2 -A-	Spin Coat Hood (left spinner) - ANY MATERIAL	Schedule time View calendar
COATHOOD2 -B-	Spin Coat Hood (right spinner) - ANY MATERIAL	Schedule time View calendar
DEVHOOD1 -A-	Develop Hood (left side)	Schedule time View calendar
DEVHOOD1 -B-	Develop Hood (right side)	Schedule time View calendar
EBL1	E-Beam Lithography System	Schedule time View calendar
ELL1	Ellipsometer	Schedule time View calendar
EVAP1	E-Beam Metal Evaporator	Schedule time View calendar
EVAP2	E-beam & Thermal Metal Evaporator	Schedule time View calendar
FLIP1	Flip Chip Bonder	Schedule time View calendar
FURN3	Furnace - Hydrogen anneal	Schedule time View calendar
GLOVE1	Glove Box	Schedule time View calendar
HOT1	Digital Hot Plate	Schedule time View calendar
NANO1	Film Thickness Measurement	Schedule time View calendar
OVEN2	Bake Oven	Schedule time View calendar
OVEN3	Vacuum Bake Oven	Schedule time View calendar
PECVD1	Plasma Enhanced Chemical Vapor Deposition System	Schedule time View calendar
PHOTO1	Mask Aligner	Schedule time View calendar
PHOTO2	Frontside/Backside Mask Aligner	Schedule time View calendar
PROBE1	Probe Station	Schedule time View calendar
PROF2	Profilometer	Schedule time View calendar
RIE1	Oxide/Nitride/Polymer Reactive Ion Etcher	Schedule time View calendar
RIE2	III-V Reactive Ion Etcher	Schedule time View calendar
RTA1	Rapid Thermal Anneal System	Schedule time View calendar
SCOPE1	Microscope w/ camera (manual)	Schedule time View calendar
SCOPE3	Fluorescence Microscope w/camera	Schedule time View calendar
SCOPE4	Nomarski Microsope w/camera	Schedule time View calendar
SOLVHOOD1	Small Solvent Chemical Hood	Schedule time View calendar
SOLVHOOD2	Large ADA Solvent Chemical Hood	Schedule time View calendar
SPUT2	RF Dielectric Sputter System	Schedule time View calendar
SPUT3	DC Sputter System	Schedule time View calendar
X-RAY LAB (1537 Fitzpatrick CIEMAS)
XDIF1	X-Ray Diffractometer	Schedule time View calendar
XPS1	X-Ray Photoelectron Spectrometer	Schedule time View calendar
OPTICAL CHARACTERIZATION LAB (1541 Fitzpatrick CIEMAS)
OPT2	FT-IR Spectrometer	Schedule time View calendar
OPT3	RAMAN/PL	Schedule time View calendar
AFM / ZYGO / MSA LAB (1545 Fitzpatrick CIEMAS)
AFM1	Scanning Probe Microscope	Schedule time View calendar
MSA1	Micro-Strain Analyzer	Schedule time View calendar
OPT1	UV-Vis-NIR Spectrophotometer	Schedule time View calendar
SCOPE2	Stereo Microscope	Schedule time View calendar
ZYGO1	3D Optical Profiler	Schedule time View calendar
TEM LAB (1549 Fitzpatrick CIEMAS)
TEM2	Transmission Electron Microscope	Schedule time View calendar
SEM LAB (1557 and 1567 Fitzpatrick CIEMAS)
SEM1	Scanning Electron Microscope	Schedule time View calendar
SEM2	Environmental Scanning Electron Microscope	Schedule time View calendar
SAMPLE PREP & OFFLINE LAB (1562 Fitzpatrick CIEMAS)
ACIDHOOD3	Prep/Offline Acid Chemical Hood	Schedule time View calendar
CPD1	Critical Point Dryer	Schedule time View calendar
OVEN1	High Temperature Bake Oven	Schedule time View calendar
OVEN4	Low Temperature Oven for Non-Hazardous Materials	Schedule time View calendar
PARYL1	Parylene Coater	Schedule time View calendar
PLAP1	Polishing and Lapping Machine	Schedule time View calendar
SAW1	Precision Sectioning Machine (Dicing Saw)	Schedule time View calendar
SCOPE5	Microscope	Schedule time View calendar
SCOPE6	Microscope w/camera	Schedule time View calendar
SCOPE7	Stereo Microscope	Schedule time View calendar
SOLVHOOD3	Prep/Offline Solvent Chemical Hood	Schedule time View calendar
SPUT1	Vacuum Coating System	Schedule time View calendar
SPUT4	Vacuum Sputter Coater	Schedule time View calendar
VITRO1	Vitrobot	Schedule time View calendar
WIBO1	Wire Bonder	Schedule time View calendar